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Chemical Delivery System

Product Detail Information

 Impurity : Controlling chemical constituents in units of PPT
Particle : Controlling particles smaller than 1pcs/ml(size : 0.1㎛)
Up-time : More than 99.9%
MTBF : More than 3,500 hours
In supplying both inorganic (Acids/Caustics/Alkali) and organic (Solvents) substances, both of pump and PN2 pressurization systems are applicable.